Non-Equilibrium Impurity Diffusion in Silicon and Silicon Carbide

Autor: Bagraev, N.T., Chaikina, E.I., Klyachkin, L.E.
Zdroj: Diffusion and Defect Data Part B: Solid State Phenomena; December 1993, Vol. 32 Issue: 1 p253-258, 6p
Abstrakt: Not Available
Databáze: Supplemental Index