Hydrogen-Enhanced Transformation of Eletrical and Structural Properties of Thin Subsurface Ion Implanted Silicon Layer in SiO2-Si Systems
| Autor: | Terukov, E.I., Ber, B.J., Kudojarova, V.Kh., Davydov, V.Ju., Nazarov, A.N., Vovk, Ja.N., Ashok, S. |
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| Zdroj: | Diffusion and Defect Data Part B: Solid State Phenomena; August 1999, Vol. 69 Issue: 1 p595 |
| Abstrakt: | Not Available |
| Databáze: | Supplemental Index |
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