Heterogeneous Ion Synthesis of Isolating Layers in Si
| Autor: | Barabanenkov, M.Yu., Borun, A.F., Danilin, A.B., Malinin, A.A., Mordkovich, V.N. |
|---|---|
| Zdroj: | Diffusion and Defect Data Part B: Solid State Phenomena; January 1989, Vol. 6 Issue: 1 p517-524, 8p |
| Abstrakt: | Not Available |
| Databáze: | Supplemental Index |
| Externí odkaz: |
|