Analysis of Forward Current-Voltage Characteristics of Non-Ideal Ti/4H-SiC Schottky Barriers

Autor: Ivanov, Pavel A., Potapov, Alexander S., Samsonova, Tat'yana P.
Zdroj: Materials Science Forum; March 2009, Vol. 615 Issue: 1 p431-434, 4p
Abstrakt: Forward current-voltage characteristics of non-ideal Ti / 4H-SiC Schottky barriers with ideality factor n = 1.1 - 1.2 have been analyzed. The non-ideality is considered as a result of formation of a thin intermediate dielectric layer between the deposited titanium layer and 4H-SiC. Using experimental current-voltage characteristics, the electro-physical characteristics of Ti contacts such as the energy barrier height, the thickness of the intermediate layer and the energy distribution of the interface trap density are determined.
Databáze: Supplemental Index