Investigation of Two-Stage Activation Annealing of Al-Implanted 4H-SiC Layers
| Autor: | Merrett, J. Neil, Scofield, James D., Tsao, Bang Hung, Mazzola, Michael S., Seale, D., Draper, W.A., Sankin, Igor, Casady, Jeff B., Bondarenko, V. |
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| Zdroj: | Materials Science Forum; June 2004, Vol. 457 Issue: 1 p921-924, 4p |
| Abstrakt: | Not Available |
| Databáze: | Supplemental Index |
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