Effect of High-Dose Aluminium Implantation on 4H-SiC Oxidation
| Autor: | Cheng, Lin, Casady, Janna R.B., Mazzola, Janice, Casady, Jeff B., Koshka, Yaroslav, Bondarenko, V. |
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| Zdroj: | Materials Science Forum; June 2004, Vol. 457 Issue: 1 p885-888, 4p |
| Abstrakt: | Not Available |
| Databáze: | Supplemental Index |
| Externí odkaz: |
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