Improvement of SiC Wafer Warp by Annealing
| Autor: | Sasaki, Makato, Harada, Shinsuke, Okamoto, Yoshihiro, Kinoshita, Hideo, Miyanagi, Youichi, Shiomi, Hiromu |
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| Zdroj: | Materials Science Forum; June 2004, Vol. 457 Issue: 1 p829-832, 4p |
| Abstrakt: | Not Available |
| Databáze: | Supplemental Index |
| Externí odkaz: |
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