Chemi-Mechanical Polishing of On-Axis Semi-Insulating SiC Substrates
| Autor: | Heydemann, V.D., Everson, W.J., Gamble, Rick D., Snyder, David W., Skowronski, Marek |
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| Zdroj: | Materials Science Forum; June 2004, Vol. 457 Issue: 1 p805-808, 4p |
| Abstrakt: | Not Available |
| Databáze: | Supplemental Index |
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