Hydrogen Incorporation into SiC Using Plasma-Hydrogenation

Autor: Koshka, Yaroslav, Draper, W.A., Lakshman, R.Y., Scofield, James D., Saddow, Stephen E.
Zdroj: Materials Science Forum; April 2002, Vol. 389 Issue: 1 p569-572, 4p
Abstrakt: Not Available
Databáze: Supplemental Index