Radio Frequency Discharge with Dust Particles

Autor: Chutov, Yu.I., Goedheer, W.J., Kravchenko, O.Yu., Zuz, V.M., Yan, M.
Zdroj: Materials Science Forum; November 2001, Vol. 382 Issue: 1 p69
Abstrakt: Not Available
Databáze: Supplemental Index