Hydrogenation and Passivation of B in Si by Boiling in Water Pressurized up to 10 ATM

Autor: Ohmura, Y., Libezny, M., Ohtaka, M., Kimoto, A., Yamaura, M.
Zdroj: Materials Science Forum; December 1997, Vol. 258 Issue: 1 p185-190, 6p
Abstrakt: Not Available
Databáze: Supplemental Index