Interstitials in Silicon Produced by Electron Beam Doping (Superdiffusion)
Autor: | Wada, Takao, Hagino, Takashi, Fujimoto, Hiroshi, Masuda, Haruho |
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Zdroj: | Materials Science Forum; November 1995, Vol. 196 Issue: 1 p1613-1618, 6p |
Abstrakt: | Not Available |
Databáze: | Supplemental Index |
Externí odkaz: |