Interstitials in Silicon Produced by Electron Beam Doping (Superdiffusion)

Autor: Wada, Takao, Hagino, Takashi, Fujimoto, Hiroshi, Masuda, Haruho
Zdroj: Materials Science Forum; November 1995, Vol. 196 Issue: 1 p1613-1618, 6p
Abstrakt: Not Available
Databáze: Supplemental Index