Reactions between SiCl4 and NH3 Leading to the Formation of Silicon Nitride Powders

Autor: Ziegenbalg, Gerald, Focke, Thomas, Holldorf, Horst, Brink, Reinhold, Lange, Horst
Zdroj: Key Engineering Materials; April 1997, Vol. 132 Issue: 1 p149-152, 4p
Abstrakt: Not Available
Databáze: Supplemental Index