Statistical modeling of the film-coating process in a vacuum
| Autor: | Kalashnik, L. I., Kislov, A. M., Livshits, É. M. |
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| Zdroj: | Journal of Engineering Physics and Thermophysics; July 1969, Vol. 17 Issue: 1 p890-893, 4p |
| Abstrakt: | We describe the application of the method of statistical modeling through the use of an electronic digital computer to solve the problem of the distribution of film thickness for various geometric and physical parameters in the elements of a deposition system. |
| Databáze: | Supplemental Index |
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