| Autor: |
Bremer, T., Kollewe, D., Koschmieder, H., Heiland, W. |
| Zdroj: |
Fresenius' Journal of Analytical Chemistry; January 1989, Vol. 333 Issue: 4-5 p485-487, 3p |
| Abstrakt: |
In order to increase the refractive indices of LiNbO3 just beneath the surface, i.e. to produce waveguides, titanium was incorporated into y-cut substrates by two different methods: Evaporated Ti layers were either diffused at 1000°C or mixed into the substrate with a 3 MeV Ti+ beam. Radiation damage caused by ion beam mixing was removed by epitaxial regrowth. The resulting Ti concentration profiles were investigated by means of secondary ion mass spectrometry. The diffused profiles could be fitted by half Gaussians with a diffusion constant ofD = 5.25 × 10-17 m2/s at 1000°C. The ion beam mixed and annealed profiles show a non-zero slope at the surface and differ significantly from Gaussians. |
| Databáze: |
Supplemental Index |
| Externí odkaz: |
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