Mass spectrometric studies of impurities in gallium arsenide crystals

Autor: Brice, J. C., Roberts, J. A., Smith, G.
Zdroj: Journal of Materials Science; March 1967, Vol. 2 Issue: 2 p131-138, 8p
Abstrakt: Techniques for the investigation of impurities in gallium arsenide crystals using mass spectrometry are described. The results obtained show a fair correlation with electrical measurements. Flat-bottomed etch pits are found which can be correlated with the oxygen content.
Databáze: Supplemental Index