Mass spectrometric studies of impurities in gallium arsenide crystals
Autor: | Brice, J. C., Roberts, J. A., Smith, G. |
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Zdroj: | Journal of Materials Science; March 1967, Vol. 2 Issue: 2 p131-138, 8p |
Abstrakt: | Techniques for the investigation of impurities in gallium arsenide crystals using mass spectrometry are described. The results obtained show a fair correlation with electrical measurements. Flat-bottomed etch pits are found which can be correlated with the oxygen content. |
Databáze: | Supplemental Index |
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