Quantitative estimate of the resolving power of a raster electron microscope

Autor: Ammosov, R. M., Zheleznov, V. V., Kozlitin, A. I., Nikitin, A. V.
Zdroj: Measurement Techniques; February 1987, Vol. 30 Issue: 2 p140-142, 3p
Databáze: Supplemental Index