| Autor: |
Ammosov, R. M., Kozlitin, A. I., Nikitin, A. V. |
| Zdroj: |
Measurement Techniques; November 1994, Vol. 37 Issue: 11 p1246-1252, 7p |
| Abstrakt: |
A study has been made on how video signal noise affects the accuracy in measuring small linear dimensions in the scanning electron microscope by means of various algorithms. Proper choice of the algorithm and measurement conditions can be used with clipped-signal accumulation to reduce the random noise error to about a nanometer. |
| Databáze: |
Supplemental Index |
| Externí odkaz: |
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