Abstrakt: |
Conclusions The basic processes determining the form of the distribution functions, width of the spectra, and mean velocities of heavy particles are ionization of the gas by cathode electrons and recharging, and at pd ? 0.5 pdtr, ionization by reflected electrons. This allows use of simplified models for qualitative description of a low pressure non-selfsustaining high voltage discharge, but to obtain proper quantitative results, especially as pd ? pdtr, consideration of ionization by all forms of particles is necessary, i.e., use of model 7. The contribution of each of the simultaneously occurring processes to ion generation is larger than the contribution of the same process considered in isolation, since in the discharge there is an interrelationship and mutual intensification of the roles of the processes because each process leads to generation of particles which participate in other interactions. |