| Autor: |
Annino, A., Savio, M., Oliveri, M. E. |
| Zdroj: |
Applied Physics A: Materials Science & Processing; January 1991, Vol. 52 Issue: 1 p65-68, 4p |
| Abstrakt: |
Application of the spray method for the deposition of thin films has shown that the deposition efficiency is a decreasing function of the substrate temperature. The forces which determine the path and the time the droplets take to go from the nozzle to the substrate are analyzed. A theoretical curve of the deposition efficiency as a function of the substrate temperature has been obtained by a successive-approximation method. Experimental values of the efficiency obtained from the growth rate of the films are always a function of the substrate temperature. The good agreement of the theoretical curve with the experimental data confirms the validity of the method applied for our analysis. |
| Databáze: |
Supplemental Index |
| Externí odkaz: |
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