The velocity distribution of sputtered Zr atoms for irradiation at normal and oblique angle of incidence
Autor: | Berres, W., Bay, H. L. |
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Zdroj: | Applied Physics A: Materials Science & Processing; April 1984, Vol. 33 Issue: 4 p235-241, 7p |
Abstrakt: | Laser-induced fluorescence by means of a cw dye laser has been used for investigating the velocity distribution of sputtered Zr atoms in the ground state. In order to evaluate the data the excitation probability of the atoms in the observation volume has been measured. The velocity distribution of Zr atoms for irradiation with Ar+-ions as well as light ions at normal and oblique angle (70°) of incidence is presented. |
Databáze: | Supplemental Index |
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