Vaporization of a mixed precursor in chemical vapor deposition of YBCO films

Autor: Zhou, Gang, Meng, Guangyao, Schneider, Roger L., Sarma, Bimal K., Levy, Moises
Zdroj: Journal of Superconductivity; February 1994, Vol. 7 Issue: 1 p235-237, 3p
Abstrakt: Single-phase YBa2Cu3O7-d thin films withTc values around 90 K are readily obtained by using a single-source chemical vapor deposition technique with normal precursor mass transport. The quality of the films is controlled by adjusting the carrier gas flow rate and the precursor feed rate.
Databáze: Supplemental Index