An approximate quantitative analysis of non-equilibrium plasma transport for high density plasmas

Autor: Schram, D. C., de Haas, J. C. M., van der Mullen, J. A. M., van de Sanden, M. C. M.
Zdroj: Plasma Chemistry and Plasma Processing; March 1995, Vol. 16 Issue: Supplement 1 pS19-S42, 24p
Abstrakt: For the evaluation of transport in high density plasmas numerical models have been developed in which simultaneously the conservation laws for mass, momentum and energy are solved. For high density plasmas, which are not too far from equilibrium the commonly used thermodynamic quantities are, electron temperature Te, electron density ne, heavy particle temperature and neutral density (or pressure). In this contribution an alternative formulation is described in which the plasma state is described by electron density ne and total pressure p and two non-equilibrium parameters: the deviation from Saha equilibrium of the neutral ground state (db1 = n1/n1saha-1) and the deviation from thermal equilibrium between electrons and heavy particles dT = 1-Th/Te. The latter two parameters are zero in local thermodynamic equilibrium.
Databáze: Supplemental Index