| Autor: |
Bistué, G., Elizalde, J.G., García-Alonso, S., Castaño, E., Gracia, F.J., García-Alonso, A. |
| Zdroj: |
Sensors and Actuators A: Physical; July 1997, Vol. 62 Issue: 1-3 p591-594, 4p |
| Abstrakt: |
The main features involved in the design of a pressure sensor are the maximum non-destructive pressure and the sensitivity. In this work, these two characteristics are related to the following design variables: dimensions of the membrane and mechanical properties of the selected material. Von Misses stress and strain distributions have been calculated by the finite-element method (FEM). The knowledge of these distributions is a good design guideline for an accurate location of the piezoresistors. The results obtained have been applied to the design of silicon microsensors for biomedical and domestic applications. |
| Databáze: |
Supplemental Index |
| Externí odkaz: |
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