Performance of pupil-filtering stepper-lens system
| Autor: | Fukuda, H., Kobayashi, Y., Tawa, T., Okazaki, S. |
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| Zdroj: | Microelectronic Engineering; February 1995, Vol. 27 Issue: 1-4 p213-216, 4p |
| Abstrakt: | Various types of pupil filters are applied to an i-line stepper lens, enhancing the depth of focus (DOF) for window, L/S, and isolated line patterns by about three times. This achieves a large DOF with a small optical proximity effect, and is also applicable to random patterns. |
| Databáze: | Supplemental Index |
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