| Autor: |
Vintizenko, L. G., Koval’, N. N., Shchanin, P. M., Tolkachev, V. S. |
| Zdroj: |
Instruments and Experimental Techniques; May 2000, Vol. 43 Issue: 3 p375-377, 3p |
| Abstrakt: |
The design and basic parameters of an arc plasma generator based on a combined cathode are described. The cathode consists of a hot tungsten filament located in the hollow cathode. A plasma stream with a cross section of 150×10 cm2and a density of ∼1010cm−3at a pressure of 0.1–1 Pa is generated at a discharge current of up to 60 A without a cathode spot. The plasma generator can be utilized for final cleaning and activation of surfaces of materials and articles before depositing functional coatings on them and in plasma-assisted deposition by using either vacuum arc or magnetron discharges. |
| Databáze: |
Supplemental Index |
| Externí odkaz: |
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