| Autor: |
Nagatomo, Takao, Kosaka, Terunobu, Omori, Shigeru, Omoto, Osamu |
| Zdroj: |
Ferroelectrics; October 1981, Vol. 37 Issue: 1 p681-684, 4p |
| Abstrakt: |
BaTiO3 films have been fabricated onto platinum and fused-quartz substrates by rf planar-magnetron sputtering using BaTiO3 ceramic target. For the substrate temperatures above 500 °C, the films have the perovskite structure. Preferential orientations, grain sizes and lattice constants of these films vary with the substrate temperatures and gas pressures. Ferroelectric properties are observed for BaTiO3 films fabricated at the substrate temperature of 700 °C and the gas pressures above 10-2 Torr. |
| Databáze: |
Supplemental Index |
| Externí odkaz: |
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