Preparation and Characterization of Organic-Inorganic Hybrid Materials Via Sol-Gel Reaction for Interlayer Dielectrics

Autor: Baek, NamSeob, Song, Young-Bae, Kim, HwanKyu, Hwang, SeungSang, Hong, SoonMan
Zdroj: Molecular Crystals and Liquid Crystals; September 2000, Vol. 349 Issue: 1 p263-266, 4p
Abstrakt: AbstractPolyimides containing hydroxyl group, so-called poly(hydroxy-imide)s, were prepared by the thermal imidization in the presence of m-cresol. The poly(hydroxy-imide)s exhibited high resistance to thermal degradation, with 10% weight loss temperature starting at near 527°C in air. The organic/inorganic hybrid materials were prepared with TEOS by acid-catalyzed sol-gel reaction of sol-gel polyimide precursors obtained from the coupling reaction of the poly(hydroxy-imide) with 3-(triethoxysilyl)propyl isocyanate. All of the cured hybrid films spin-coated on ITO glass are transparent. The initial decomposition temperature was recorded at 356°C. The dielectric constant of a hybrid material film was 3.24 at the frequency of 10kHz. The hybrid materials retained the coefficient of thermal expansion up to 3 ppm/°C below Tg and 30 ppm/°C above Tg.
Databáze: Supplemental Index