Autor: |
Kawabata, Shuichi, Motoki, Masahiro |
Předmět: |
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Zdroj: |
Applied Optics: Optical Technology & Biomedical Optics; 4/1/97, Vol. 36 Issue 10, p2178, 5p, 2 Diagrams, 5 Graphs |
Abstrakt: |
Proposes an alternative method for calibrating the electronic system in the ellipsometric measurement configuration. Versatility of the method; Measured values of attenuation coefficient of the electronic system at various rotation speeds of the rotating-analyzer ellipsometer; Corrected apparent initial azimuth of the analyzer. |
Databáze: |
Supplemental Index |
Externí odkaz: |
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