Calibration method of the specific characteristic of an electronic system of a rotating-analyzer...

Autor: Kawabata, Shuichi, Motoki, Masahiro
Předmět:
Zdroj: Applied Optics: Optical Technology & Biomedical Optics; 4/1/97, Vol. 36 Issue 10, p2178, 5p, 2 Diagrams, 5 Graphs
Abstrakt: Proposes an alternative method for calibrating the electronic system in the ellipsometric measurement configuration. Versatility of the method; Measured values of attenuation coefficient of the electronic system at various rotation speeds of the rotating-analyzer ellipsometer; Corrected apparent initial azimuth of the analyzer.
Databáze: Supplemental Index