XPS Investigation of the Atomic Layer Deposition HalfReactions of Bis(N-tert-butyl-N′-ethylpropionamidinato)Cobalt(II).
| Autor: | Elko-Hansen, Tyler D.-M., Ekerdt, John G. |
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| Zdroj: | Chemistry of Materials; Apr2014, Vol. 26 Issue 8, p2642-2646, 5p |
| Databáze: | Supplemental Index |
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