| Autor: |
Ikegawa, Masato, Kobayashi, Jun'ichi, Maruko, Morihisa |
| Předmět: |
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| Zdroj: |
Journal of Fluids Engineering; Jun98, Vol. 120 Issue 2, p296, 7p, 8 Diagrams, 1 Chart, 6 Graphs |
| Abstrakt: |
Presents an engineering analysis of the deposition of submicron trenches using the direct simulation Monte Carlo method. What deposition consists of; Development of a deposition profile simulator using the Monte Carlo method; Reason for the development of the deposition; Conclusions reached in the analysis. |
| Databáze: |
Supplemental Index |
| Externí odkaz: |
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