| Autor: |
T. Tamulevičius, R. Šeperys, Morkūnas, V., Kopustinskas, V., Andrulevičius, M., Tamulevičius, S. |
| Předmět: |
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| Zdroj: |
International Conference: Radiation Interaction with Material & Its Uses in Technologies; 2010, p357-360, 4p, 1 Graph |
| Abstrakt: |
In this work we present an application of phase diffraction gratings (period 2-4 μm) for visible range laser beam splitters. The periodical structures were fabricated in fused quartz substrates employing optical contact lithography and plasma chemical etching. The target depth of the etched structures was chosen from the simulations carried out employing GSolver software based on rigorous coupled wave analysis. The efficiencies of the fabricated beam splitters were evaluated experimentally by measuring scattered light intensities employing different wavelength lasers (λ: 405 nm, 632.8 nm). [ABSTRACT FROM AUTHOR] |
| Databáze: |
Supplemental Index |
| Externí odkaz: |
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