Investigation of AlMe3, BEt3, and ZnEt2as Co-Reagents for Low-Temperature Copper Metal ALD/Pulsed-CVD.
| Autor: | Balamurugan Vidjayacoumar, David J. H. Emslie, Scott B. Clendenning, James M. Blackwell, James F. Britten, Arnold Rheingold |
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| Zdroj: | Chemistry of Materials; Sep2010, Vol. 22 Issue 17, p4844-4853, 10p |
| Databáze: | Supplemental Index |
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