| Autor: |
Tamulevičius, T., Andrulevičius, M., Šileikaitė, A., Puodžiukynas, L., Morkūnas, V., Tamulevičius, S. |
| Předmět: |
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| Zdroj: |
International Conference: Radiation Interaction with Material & Its Uses in Technologies; 2008, p66-71, 6p, 1 Diagram, 4 Graphs |
| Abstrakt: |
In this work linear diffraction gratings were produced by laser beam interference lithography (LIL) using HeCd laser (λ=441.6nm, P=15mW) in the Microposit® S1805® positive photoresist spin coated (3000 rpm) on glass substrates. The diffraction efficiency of the gratings was estimated employing lasers of different wavelengths (405nm - Laser diode (LD), 533nm - Diode pumped solid state (DPSS), 632.8nm - HeNe). Linear dimensions of the periodical structures were evaluated using diffraction stand. Possible applications of diffraction gratings formed with LIL for sensing in the Grating Light Reflection Spectroscopy (GLRS) are presented. Use of the interference gratings for glass substrate refractive index determination is presented. [ABSTRACT FROM AUTHOR] |
| Databáze: |
Supplemental Index |
| Externí odkaz: |
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