Photocatalytic Lithography Processing via Poly(vinyl butyral)/TiO2Photoresists by Ultraviolet (UV) Exposure.

Autor: Leo Chau-Kuang Liau, Wen-Wei Chou, Rung-Kang Wu
Zdroj: Industrial & Engineering Chemistry Research; Apr2008, Vol. 47 Issue 7, p2273-2278, 6p
Databáze: Supplemental Index