| Autor: |
Netravali, A. N., Thompson, M. O., Phoenix, S. L. |
| Zdroj: |
Annual Report - National Textile Center; 2006, p1-6, 6p |
| Abstrakt: |
To overcome the mechanical performance limitations of silicon, we have developed a novel materials technology for MEMS based on fibrous materials and successfully demonstrated initial devices. The performance of fiber MEMS cantilever optical scanner structures built in our laboratory has shown that fibrous materials are indeed mechanically superior, in many ways, to silicon and its derivatives currently used in MEMS. Enhancements in the processing of fibrous structures into MEMS devices, coupled with the integration of electronic elements promises the realization of many envisioned MEMS applications currently unavailable due to the inadequate mechanical performance of existing materials. These MEMS cantilever structures also have shown to be almost fatigue-free even at large amplitudes. [ABSTRACT FROM AUTHOR] |
| Databáze: |
Supplemental Index |
| Externí odkaz: |
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