Hybrid Silicon-Organic Methacrylate Monomers and Hyperbranched Polymers that Override the Ohnishi Parameter for Oxygen Plasma Etch Resistance.
| Autor: | Hartmann-Thompson, Claire, Lilygren, Elizabeth, Mekonnen, Adunya, Schwartz, Evan, Xie, Sihan, Killeen, Simon, Bedoya, Cedric, Percha, Pamela, Crain, Patrick |
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| Zdroj: | ACS Applied Polymer Materials; 7/12/2024, Vol. 6 Issue 13, p7383-7392, 10p |
| Databáze: | Supplemental Index |
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