Ab Initio Prediction of Vapor Pressure for Diverse Atomic Layer Deposition Precursors.
| Autor: | Odinokov, Alexey, Son, Won-Joon, Yakubovich, Alexander, Park, Ji Young, Jung, Yongsik |
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| Zdroj: | Journal of Chemical Theory & Computation; 7/23/2024, Vol. 20 Issue 14, p6144-6151, 8p |
| Databáze: | Supplemental Index |
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