Improving the Properties of SrRuO3 Electrode Films Grown by Atomic Layer-Deposited SrO and Pulsed Chemical Vapor-Deposited RuO2 Using Al2O3 Capping Layers.
| Autor: | Lim, Junil, Kwon, Dae Seon, Seo, Haengha, Kim, Tae Kyun, Paik, Heewon, Shin, Jonghoon, Song, Haewon, Jang, Yoon Ho, Park, Yu-kyung, Lee, Keonuk, Kim, Young Sin, Choi, Jung-Hae, Hwang, Cheol Seong |
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| Zdroj: | ACS Applied Electronic Materials; 8/22/2023, Vol. 5 Issue 8, p4494-4503, 10p |
| Databáze: | Supplemental Index |
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