Area-Selective Deposition of AlOx and Al-Silicate for Fully Self-Aligned Via Integration.
| Autor: | Pasquali, Mattia, Brady-Boyd, Anita, Leśniewska, Alicja, Carolan, Patrick, Conard, Thierry, O'Connor, Robert, De Gendt, Stefan, Armini, Silvia |
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| Zdroj: | ACS Applied Materials & Interfaces; 2/1/2023, Vol. 15 Issue 4, p6079-6091, 13p |
| Databáze: | Supplemental Index |
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