Retention Improvement of HZO-Based Ferroelectric Capacitors with TiO2 Insets.
| Autor: | Koroleva, Aleksandra A., Chernikova, Anna G., Zarubin, Sergei S., Korostylev, Evgeny, Khakimov, Roman R., Zhuk, Maksim Yu., Markeev, Andrey M. |
|---|---|
| Zdroj: | ACS Omega; 12/20/2022, Vol. 7 Issue 50, p47084-47095, 12p |
| Databáze: | Supplemental Index |
| Externí odkaz: |
|