Effect of AcAc/Al molar ratio on morphological and electrical properties of spray-coated Al2O3 thin films.

Autor: Dehghani, Mehdi, Lee, Hojun, Shahbazi, Saeed, Kim, Kyoung-Ho, Kang, Evan S. Hyunkoo
Zdroj: Journal of the Korean Physical Society; Oct2022, Vol. 81 Issue 7, p669-674, 6p
Databáze: Supplemental Index