Crystallization Behavior of Zinc-Doped Nb2O5 Thin Films Synthesized by Atomic Layer Deposition.
| Autor: | Kozen, Alexander C., Woodward, Jeffrey M., Ruppalt, Laura B., Cho, Hans, Ventrice Jr., Carl A., Rowley, Andrew H., Zhe, Nicole, Mesiti, Alex, Sargent, Emma, Michels, James H., Robinson, Zachary R. |
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| Zdroj: | ACS Applied Electronic Materials; 9/27/2022, Vol. 4 Issue 9, p4280-4287, 8p |
| Databáze: | Supplemental Index |
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