Low-Temperature Route to Direct Amorphous to Rutile Crystallization of TiO2 Thin Films Grown by Atomic Layer Deposition.
| Autor: | Saari, Jesse, Ali-Löytty, Harri, Lahtonen, Kimmo, Hannula, Markku, Palmolahti, Lauri, Tukiainen, Antti, Valden, Mika |
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| Zdroj: | Journal of Physical Chemistry C; 9/15/2022, Vol. 126 Issue 36, p15357-15366, 10p |
| Databáze: | Supplemental Index |
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