Real-Time In Situ Parallel Detection of Elements and Molecules with TOFMS during ALD for Chemical Quality Control of Thin Films.
| Autor: | Priebe, Agnieszka, Dousse, Bryan, Chia-Yu Tzou, Papadopoulos, Georgios, Utke, Ivo, Bensaoula, Abdelhak, Michler, Johann, Guerra-Nuñez, Carlos |
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| Zdroj: | Journal of Physical Chemistry C; 2/3/2022, Vol. 126 Issue 4, p1901-1912, 12p |
| Databáze: | Supplemental Index |
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