Synthesis of Aminosilane Chemical Vapor Deposition Precursors and Polycarbosilazanes through Manganese-Catalyzed Si-N Dehydrocoupling.
| Autor: | Nguyen, Thao T., Mukhopadhyay, Tufan K., MacMillan, Samantha N., Janicke, Michael T., Trovitch, Ryan J. |
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| Zdroj: | ACS Sustainable Chemistry & Engineering; 4/4/2022, Vol. 10 Issue 13, p4218-4226, 9p |
| Databáze: | Supplemental Index |
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