Structural, Optical, and Electronic Properties of Cu-Doped TiNxOy Grown by Ammonothermal Atomic Layer Deposition.
| Autor: | Baron, Filipp A., Mikhlin, Yurii L., Molokeev, Maxim S., Rautskiy, Mikhail V., Tarasov, Ivan A., Volochaev, Mikhail N., Shanidze, Lev V., Lukyanenko, Anna V., Smolyarova, Tatiana E., Konovalov, Stepan O., Zelenov, Fyodor V., Tarasov, Anton S., Volkov, Nikita V. |
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| Zdroj: | ACS Applied Materials & Interfaces; 7/14/2021, Vol. 13 Issue 27, p32531-32541, 11p |
| Databáze: | Supplemental Index |
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