| Autor: |
Schmid, Otmar, Trueblood, Max B., Hagen, Donald E., Whitefield, Philip D. |
| Předmět: |
|
| Zdroj: |
Journal of the IEST; 2004, Vol. 47, p111-115, 5p |
| Abstrakt: |
Focuses on the research regarding online monitoring of nanoparticle contamination in reactive gases. Requirements of numerous manufacturing processes to ensure product quality; Necessity of online monitoring of the cleanliness of possibly reactive process gases for quality control purposes; Design for an online nanoparticle monitoring system for reactive process gases from commercially available components. |
| Databáze: |
Supplemental Index |
| Externí odkaz: |
|
