Effect of Subcycle Arrangement on Direct Epitaxy in ALD of LaNiO3.
| Autor: | Sønsteby, Henrik H., Skaar, Erik, Fjellvåg, Helmer, Nilsen, Ola |
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| Zdroj: | ACS Applied Electronic Materials; 1/26/2021, Vol. 3 Issue 1, p292-298, 7p |
| Databáze: | Supplemental Index |
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