Controlled Electrochemical Formation of GexSbyTez using Atomic Layer Deposition (ALD).
| Autor: | Liang, Xuehai, Jayaraju, Nagarajan, Thambidurai, Chandru, Zhang, Qinghui, Stickney, John L. |
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| Zdroj: | Chemistry of Materials; Apr2011, Vol. 23 Issue 7, p1742-1752, 11p |
| Databáze: | Supplemental Index |
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